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Electron Information in Single- and Dual-Frequency Capacitive Discharges at Atmospheric Pressure
Determining the electron properties of weakly ionized gases, particularly in a high electron-neutral collisional condition, is a nontrivial task; thus, the mechanisms underlying the electron characteristics and electron heating structure in radio-frequency (rf) collisional discharges remain unclear....
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| Veröffentlicht in: | Sci Rep |
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| Hauptverfasser: | , , , |
| Format: | Artigo |
| Sprache: | Inglês |
| Veröffentlicht: |
Nature Publishing Group UK
2018
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| Schlagworte: | |
| Online Zugang: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5951922/ https://ncbi.nlm.nih.gov/pubmed/29760408 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/s41598-018-25892-w |
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