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PECVD of Hexamethyldisiloxane Coatings Using Extremely Asymmetric Capacitive RF Discharge
An extremely asymmetric low-pressure discharge was used to study the composition of thin films prepared by PECVD using HMDSO as a precursor. The metallic chamber was grounded, while the powered electrode was connected to an RF generator. The ratio between the surface area of the powered and grounded...
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| Publicado no: | Materials (Basel) |
|---|---|
| Main Authors: | , , , , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI
2020
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7254392/ https://ncbi.nlm.nih.gov/pubmed/32384729 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/ma13092147 |
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