Laddar...
PECVD of Hexamethyldisiloxane Coatings Using Extremely Asymmetric Capacitive RF Discharge
An extremely asymmetric low-pressure discharge was used to study the composition of thin films prepared by PECVD using HMDSO as a precursor. The metallic chamber was grounded, while the powered electrode was connected to an RF generator. The ratio between the surface area of the powered and grounded...
Sparad:
| I publikationen: | Materials (Basel) |
|---|---|
| Huvudupphovsmän: | , , , , , , , |
| Materialtyp: | Artigo |
| Språk: | Inglês |
| Publicerad: |
MDPI
2020
|
| Ämnen: | |
| Länkar: | https://ncbi.nlm.nih.gov/pmc/articles/PMC7254392/ https://ncbi.nlm.nih.gov/pubmed/32384729 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/ma13092147 |
| Taggar: |
Lägg till en tagg
Inga taggar, Lägg till första taggen!
|