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The Effect of Film Thickness on the Gas Sensing Properties of Ultra-Thin TiO(2) Films Deposited by Atomic Layer Deposition
Analyte sensitivity for gas sensors based on semiconducting metal oxides should be highly dependent on the film thickness, particularly when that thickness is on the order of the Debye length. This thickness dependence has previously been demonstrated for SnO(2) and inferred for TiO(2). In this pape...
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| Pubblicato in: | Sensors (Basel) |
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| Autori principali: | , , , , , , |
| Natura: | Artigo |
| Lingua: | Inglês |
| Pubblicazione: |
MDPI
2018
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| Soggetti: | |
| Accesso online: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5876708/ https://ncbi.nlm.nih.gov/pubmed/29494504 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s18030735 |
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