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The Effect of Film Thickness on the Gas Sensing Properties of Ultra-Thin TiO(2) Films Deposited by Atomic Layer Deposition

Analyte sensitivity for gas sensors based on semiconducting metal oxides should be highly dependent on the film thickness, particularly when that thickness is on the order of the Debye length. This thickness dependence has previously been demonstrated for SnO(2) and inferred for TiO(2). In this pape...

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Xehetasun bibliografikoak
Argitaratua izan da:Sensors (Basel)
Egile Nagusiak: Wilson, Rachel L., Simion, Cristian Eugen, Blackman, Christopher S., Carmalt, Claire J., Stanoiu, Adelina, Di Maggio, Francesco, Covington, James A.
Formatua: Artigo
Hizkuntza:Inglês
Argitaratua: MDPI 2018
Gaiak:
Sarrera elektronikoa:https://ncbi.nlm.nih.gov/pmc/articles/PMC5876708/
https://ncbi.nlm.nih.gov/pubmed/29494504
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s18030735
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