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Effect of annealing treatments on CeO(2) grown on TiN and Si substrates by atomic layer deposition

In this work, we investigate the effect of thermal treatment on CeO(2) films fabricated by using atomic layer deposition (ALD) on titanium nitride (TiN) or on silicon (Si) substrates. In particular, we report on the structural, chemical and morphological properties of 25 nm thick ceria oxide with pa...

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Detalhes bibliográficos
Publicado no:Beilstein J Nanotechnol
Main Authors: Vangelista, Silvia, Piagge, Rossella, Ek, Satu, Lamperti, Alessio
Formato: Artigo
Idioma:Inglês
Publicado em: Beilstein-Institut 2018
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC5870165/
https://ncbi.nlm.nih.gov/pubmed/29600150
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3762/bjnano.9.83
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