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Structural Designing of a MEMS Capacitive Accelerometer for Low Temperature Coefficient and High Linearity
The low temperature coefficient and high linearity of the input-output characteristics are both required for high-performance microelectromechanical systems (MEMS) capacitive accelerometers. In this work, a structural designing of a bulk MEMS capacitive accelerometer is developed for both low temper...
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| Publicado no: | Sensors (Basel) |
|---|---|
| Main Authors: | , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI
2018
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5855055/ https://ncbi.nlm.nih.gov/pubmed/29470398 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s18020643 |
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