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Structural Designing of a MEMS Capacitive Accelerometer for Low Temperature Coefficient and High Linearity

The low temperature coefficient and high linearity of the input-output characteristics are both required for high-performance microelectromechanical systems (MEMS) capacitive accelerometers. In this work, a structural designing of a bulk MEMS capacitive accelerometer is developed for both low temper...

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Detalhes bibliográficos
Publicado no:Sensors (Basel)
Main Authors: He, Jiangbo, Zhou, Wu, Yu, Huijun, He, Xiaoping, Peng, Peng
Formato: Artigo
Idioma:Inglês
Publicado em: MDPI 2018
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC5855055/
https://ncbi.nlm.nih.gov/pubmed/29470398
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s18020643
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