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Glass Polarization Induced Drift of a Closed-Loop Micro-Accelerometer

The glass polarization effects were introduced in this paper to study the main cause of turn-on drift phenomenon of closed-loop micro-accelerometers. The glass substrate underneath the sensitive silicon structure underwent a polarizing process when the DC bias voltage was applied. The slow polarizin...

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Bibliografiske detaljer
Udgivet i:Materials (Basel)
Main Authors: Zhou, Wu, He, Jiangbo, Yu, Huijun, Peng, Bei, He, Xiaoping
Format: Artigo
Sprog:Inglês
Udgivet: MDPI 2018
Fag:
Online adgang:https://ncbi.nlm.nih.gov/pmc/articles/PMC5793661/
https://ncbi.nlm.nih.gov/pubmed/29361685
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/ma11010163
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