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Glass Polarization Induced Drift of a Closed-Loop Micro-Accelerometer
The glass polarization effects were introduced in this paper to study the main cause of turn-on drift phenomenon of closed-loop micro-accelerometers. The glass substrate underneath the sensitive silicon structure underwent a polarizing process when the DC bias voltage was applied. The slow polarizin...
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| Udgivet i: | Materials (Basel) |
|---|---|
| Main Authors: | , , , , |
| Format: | Artigo |
| Sprog: | Inglês |
| Udgivet: |
MDPI
2018
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| Fag: | |
| Online adgang: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5793661/ https://ncbi.nlm.nih.gov/pubmed/29361685 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/ma11010163 |
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