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On the insulator-to-metal transition in titanium-implanted silicon
Hyperdoped silicon with deep level impurities has attracted much research interest due to its promising optical and electrical properties. In this work, single crystalline silicon supersaturated with titanium is fabricated by ion implantation followed by both pulsed laser melting and flash lamp anne...
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| Publicado no: | Sci Rep |
|---|---|
| Main Authors: | , , , , , , , , , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Nature Publishing Group UK
2018
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5841356/ https://ncbi.nlm.nih.gov/pubmed/29515174 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/s41598-018-22503-6 |
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