Carregant...
Dopant Distribution in Atomic Layer Deposited ZnO:Al Films Visualized by Transmission Electron Microscopy and Atom Probe Tomography
[Image: see text] The maximum conductivity achievable in Al-doped ZnO thin films prepared by atomic layer deposition (ALD) is limited by the low doping efficiency of Al. To better understand the limiting factors for the doping efficiency, the three-dimensional distribution of Al atoms in the ZnO hos...
Guardat en:
| Publicat a: | Chem Mater |
|---|---|
| Autors principals: | , , , , , , , |
| Format: | Artigo |
| Idioma: | Inglês |
| Publicat: |
American Chemical
Society
2018
|
| Accés en línia: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5833938/ https://ncbi.nlm.nih.gov/pubmed/29515290 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1021/acs.chemmater.7b03501 |
| Etiquetes: |
Afegir etiqueta
Sense etiquetes, Sigues el primer a etiquetar aquest registre!
|