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New strategies for producing defect free SiGe strained nanolayers

Strain engineering is seen as a cost-effective way to improve the properties of electronic devices. However, this technique is limited by the development of the Asarro Tiller Grinfeld growth instability and nucleation of dislocations. Two strain engineering processes have been developed, fabrication...

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Wedi'i Gadw mewn:
Manylion Llyfryddiaeth
Cyhoeddwyd yn:Sci Rep
Prif Awduron: David, Thomas, Aqua, Jean-Noël, Liu, Kailang, Favre, Luc, Ronda, Antoine, Abbarchi, Marco, Claude, Jean-Benoit, Berbezier, Isabelle
Fformat: Artigo
Iaith:Inglês
Cyhoeddwyd: Nature Publishing Group UK 2018
Pynciau:
Mynediad Ar-lein:https://ncbi.nlm.nih.gov/pmc/articles/PMC5811444/
https://ncbi.nlm.nih.gov/pubmed/29440693
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/s41598-018-21299-9
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