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Properties-Adjustable Alumina-Zirconia Nanolaminate Dielectric Fabricated by Spin-Coating

In this paper, an alumina-zirconia (Al(2)O(3)-ZrO(2)) nanolaminate dielectric was fabricated by spin-coating and the performance was investigated. It was found that the properties of the dielectric can be adjusted by changing the content of Al(2)O(3)/ZrO(2) in nanolaminates: when the content of Al(2...

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Detalhes bibliográficos
Publicado no:Nanomaterials (Basel)
Main Authors: Peng, Junbiao, Wei, Jinglin, Zhu, Zhennan, Ning, Honglong, Cai, Wei, Lu, Kuankuan, Yao, Rihui, Tao, Hong, Zheng, Yanqiong, Lu, Xubing
Formato: Artigo
Idioma:Inglês
Publicado em: MDPI 2017
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC5746909/
https://ncbi.nlm.nih.gov/pubmed/29186081
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/nano7120419
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