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Properties-Adjustable Alumina-Zirconia Nanolaminate Dielectric Fabricated by Spin-Coating
In this paper, an alumina-zirconia (Al(2)O(3)-ZrO(2)) nanolaminate dielectric was fabricated by spin-coating and the performance was investigated. It was found that the properties of the dielectric can be adjusted by changing the content of Al(2)O(3)/ZrO(2) in nanolaminates: when the content of Al(2...
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| Publicado en: | Nanomaterials (Basel) |
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| Autores principales: | , , , , , , , , , |
| Formato: | Artigo |
| Lenguaje: | Inglês |
| Publicado: |
MDPI
2017
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| Materias: | |
| Acceso en línea: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5746909/ https://ncbi.nlm.nih.gov/pubmed/29186081 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/nano7120419 |
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