Carregant...
Evaluation of Surface Cleaning Procedures for CTGS Substrates for SAW Technology with XPS
A highly efficient and reproducible cleaning procedure of piezoelectric substrates is essential in surface acoustic waves (SAW) technology to fabricate high-quality SAW devices, especially for new applications such SAW sensors wherein new materials for piezoelectric substrates and interdigital trans...
Guardat en:
| Publicat a: | Materials (Basel) |
|---|---|
| Autors principals: | , , , , |
| Format: | Artigo |
| Idioma: | Inglês |
| Publicat: |
MDPI
2017
|
| Matèries: | |
| Accés en línia: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5744308/ https://ncbi.nlm.nih.gov/pubmed/29189721 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/ma10121373 |
| Etiquetes: |
Afegir etiqueta
Sense etiquetes, Sigues el primer a etiquetar aquest registre!
|