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Evaluation of Surface Cleaning Procedures for CTGS Substrates for SAW Technology with XPS
A highly efficient and reproducible cleaning procedure of piezoelectric substrates is essential in surface acoustic waves (SAW) technology to fabricate high-quality SAW devices, especially for new applications such SAW sensors wherein new materials for piezoelectric substrates and interdigital trans...
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| Publicado no: | Materials (Basel) |
|---|---|
| Main Authors: | , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI
2017
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5744308/ https://ncbi.nlm.nih.gov/pubmed/29189721 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/ma10121373 |
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