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Tungsten as a Chemically-Stable Electrode Material on Ga-Containing Piezoelectric Substrates Langasite and Catangasite for High-Temperature SAW Devices
Thin films of tungsten on piezoelectric substrates La(3)Ga(5)SiO(14) (LGS) and Ca(3)TaGa(3)Si(2)O(14) (CTGS) have been investigated as a potential new electrode material for interdigital transducers for surface acoustic wave-based sensor devices operating at high temperatures up to 800 °C under vacu...
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| Publicado no: | Materials (Basel) |
|---|---|
| Main Authors: | , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI
2016
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5456496/ https://ncbi.nlm.nih.gov/pubmed/28787898 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/ma9020101 |
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