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Mitigating Water Absorption in Waveguides Made From Unannealed PECVD SiO(2)
Water absorption was studied in two types of waveguides made from unannealed plasma enhanced chemical vapor deposition (PECVD) SiO(2). Standard rib anti-resonant reflecting optical waveguides (ARROWs) were fabricated with thin films of different intrinsic stress and indices of refraction. Buried ARR...
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| Publicado no: | IEEE Photonics Technol Lett |
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| Main Authors: | , , , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
2017
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5708587/ https://ncbi.nlm.nih.gov/pubmed/29200798 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1109/LPT.2017.2686354 |
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