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Improved environmental stability for plasma enhanced chemical vapor deposition SiO(2) waveguides using buried channel designs
Ridge and buried channel waveguides (BCWs) made using plasma-enhanced chemical vapor deposition SiO(2) were fabricated and tested after being subjected to long 85°C water baths. The water bath was used to investigate the effects of any water absorption in the ridge and BCWs. Optical mode spreading a...
Αποθηκεύτηκε σε:
| Τόπος έκδοσης: | Opt Eng |
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| Κύριοι συγγραφείς: | , , , , , |
| Μορφή: | Artigo |
| Γλώσσα: | Inglês |
| Έκδοση: |
2016
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| Θέματα: | |
| Διαθέσιμο Online: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5298888/ https://ncbi.nlm.nih.gov/pubmed/28190901 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1117/1.OE.55.4.040501 |
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