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Mitigating Water Absorption in Waveguides Made From Unannealed PECVD SiO(2)

Water absorption was studied in two types of waveguides made from unannealed plasma enhanced chemical vapor deposition (PECVD) SiO(2). Standard rib anti-resonant reflecting optical waveguides (ARROWs) were fabricated with thin films of different intrinsic stress and indices of refraction. Buried ARR...

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Pubblicato in:IEEE Photonics Technol Lett
Autori principali: Wall, Thomas, Hammon, Steven, Hamilton, Erik, Zacheu, Gabriel, Orfila, Marcos, Schmidt, Holger, Hawkins, Aaron R.
Natura: Artigo
Lingua:Inglês
Pubblicazione: 2017
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Accesso online:https://ncbi.nlm.nih.gov/pmc/articles/PMC5708587/
https://ncbi.nlm.nih.gov/pubmed/29200798
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1109/LPT.2017.2686354
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