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Ta(2)N(3) nanocrystals grown in Al(2)O(3) thin layers
Tantalum nitride nanoparticles (NPs) and cubic bixbyite-type Ta(2)N(3) nanocrystals (NCs) were grown in (Ta–N+Al(2)O(3))/Al(2)O(3) periodic multilayers (MLs) after thermal treatment. The MLs were prepared by magnetron deposition at room temperature and characterized using grazing incidence small-ang...
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| Publicado no: | Beilstein J Nanotechnol |
|---|---|
| Main Authors: | , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Beilstein-Institut
2017
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5669238/ https://ncbi.nlm.nih.gov/pubmed/29114442 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3762/bjnano.8.215 |
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