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Creating Active Device Materials for Nanoelectronics Using Block Copolymer Lithography
The prolonged and aggressive nature of scaling to augment the performance of silicon integrated circuits (ICs) and the technical challenges and costs associated with this has led to the study of alternative materials that can use processing schemes analogous to semiconductor manufacturing. We examin...
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| Publicado no: | Nanomaterials (Basel) |
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| Main Authors: | , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI
2017
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5666469/ https://ncbi.nlm.nih.gov/pubmed/28973987 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/nano7100304 |
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