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Creating Active Device Materials for Nanoelectronics Using Block Copolymer Lithography

The prolonged and aggressive nature of scaling to augment the performance of silicon integrated circuits (ICs) and the technical challenges and costs associated with this has led to the study of alternative materials that can use processing schemes analogous to semiconductor manufacturing. We examin...

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Bibliografische gegevens
Gepubliceerd in:Nanomaterials (Basel)
Hoofdauteurs: Cummins, Cian, Bell, Alan P., Morris, Michael A.
Formaat: Artigo
Taal:Inglês
Gepubliceerd in: MDPI 2017
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Online toegang:https://ncbi.nlm.nih.gov/pmc/articles/PMC5666469/
https://ncbi.nlm.nih.gov/pubmed/28973987
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/nano7100304
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