Effect of slurry composition on the chemical mechanical polishing of thin diamond films

Nanocrystalline diamond (NCD) thin films grown by chemical vapour deposition have an intrinsic surface roughness, which hinders the development and performance of the films’ various applications. Traditional methods of diamond polishing are not effective on NCD thin films. Films either shatter due t...

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Detalhes bibliográficos
Publicado no:Sci Technol Adv Mater
Main Authors: Werrell, Jessica M., Mandal, Soumen, Thomas, Evan L. H., Brousseau, Emmanuel B., Lewis, Ryan, Borri, Paola, Davies, Philip R., Williams, Oliver A.
Formato: Artigo
Idioma:Inglês
Publicado em: Taylor & Francis 2017
Assuntos:
Optical, Magnetic and Electronic Device Materials
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC5642826/
https://ncbi.nlm.nih.gov/pubmed/29057022
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1080/14686996.2017.1366815
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