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Effect of slurry composition on the chemical mechanical polishing of thin diamond films
Nanocrystalline diamond (NCD) thin films grown by chemical vapour deposition have an intrinsic surface roughness, which hinders the development and performance of the films’ various applications. Traditional methods of diamond polishing are not effective on NCD thin films. Films either shatter due t...
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| Vydáno v: | Sci Technol Adv Mater |
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| Hlavní autoři: | , , , , , , , |
| Médium: | Artigo |
| Jazyk: | Inglês |
| Vydáno: |
Taylor & Francis
2017
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| Témata: | |
| On-line přístup: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5642826/ https://ncbi.nlm.nih.gov/pubmed/29057022 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1080/14686996.2017.1366815 |
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