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Large-Area WS(2) Film with Big Single Domains Grown by Chemical Vapor Deposition

High-quality WS(2) film with the single domain size up to 400 μm was grown on Si/SiO(2) wafer by atmospheric pressure chemical vapor deposition. The effects of some important fabrication parameters on the controlled growth of WS(2) film have been investigated in detail, including the choice of precu...

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Detalhes bibliográficos
Publicado no:Nanoscale Res Lett
Main Authors: Liu, Pengyu, Luo, Tao, Xing, Jie, Xu, Hong, Hao, Huiying, Liu, Hao, Dong, Jingjing
Formato: Artigo
Idioma:Inglês
Publicado em: Springer US 2017
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC5626679/
https://ncbi.nlm.nih.gov/pubmed/28975587
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/s11671-017-2329-9
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