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Investigation of the Optoelectronic Properties of Ti-doped Indium Tin Oxide Thin Film

In this study, direct-current magnetron sputtering was used to fabricate Ti-doped indium tin oxide (ITO) thin films. The sputtering power during the 350-nm-thick thin-film production process was fixed at 100 W with substrate temperatures increasing from room temperature to 500 °C. The Ti-doped ITO t...

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Bibliografische gegevens
Gepubliceerd in:Materials (Basel)
Hoofdauteurs: Pu, Nen-Wen, Liu, Wei-Sheng, Cheng, Huai-Ming, Hu, Hung-Chun, Hsieh, Wei-Ting, Yu, Hau-Wei, Liang, Shih-Chang
Formaat: Artigo
Taal:Inglês
Gepubliceerd in: MDPI 2015
Onderwerpen:
Online toegang:https://ncbi.nlm.nih.gov/pmc/articles/PMC5512923/
https://ncbi.nlm.nih.gov/pubmed/28793575
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/ma8095316
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