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Boron Partitioning Coefficient above Unity in Laser Crystallized Silicon

Boron pile-up at the maximum melt depth for laser melt annealing of implanted silicon has been reported in numerous papers. The present contribution examines the boron accumulation in a laser doping setting, without dopants initially incorporated in the silicon wafer. Our numerical simulation models...

Täydet tiedot

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Bibliografiset tiedot
Julkaisussa:Materials (Basel)
Päätekijät: Lill, Patrick C., Dahlinger, Morris, Köhler, Jürgen R.
Aineistotyyppi: Artigo
Kieli:Inglês
Julkaistu: MDPI 2017
Aiheet:
Linkit:https://ncbi.nlm.nih.gov/pmc/articles/PMC5459181/
https://ncbi.nlm.nih.gov/pubmed/28772548
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/ma10020189
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