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Unified Model for Laser Doping of Silicon from Precursors

Laser doping of silicon with the help of precursors is well established in photovoltaics. Upon illumination with the constant or pulsed laser beam, the silicon melts and doping atoms from the doping precursor diffuse into the melted silicon. With the proper laser parameters, after resolidification,...

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Bibliographic Details
Published in:Materials (Basel)
Main Authors: Hassan, Mohamed, Dahlinger, Morris, Köhler, Jürgen R., Zapf-Gottwick, Renate, Werner, Jürgen H.
Format: Artigo
Language:Inglês
Published: MDPI 2021
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Online Access:https://ncbi.nlm.nih.gov/pmc/articles/PMC8124229/
https://ncbi.nlm.nih.gov/pubmed/33947085
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/ma14092322
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