An All Oxide-Based Imperceptible Thin-Film Transistor with Humidity Sensing Properties

We have examined the effects of oxygen content and thickness in sputtered InSnO (ITO) electrodes, especially for the application of imperceptible amorphous-InGaZnO (a-IGZO) thin-film transistors (TFTs) in humidity sensors. The imperceptible a-IGZO TFT with 50-nm ITO electrodes deposited at Ar:O(2) =...

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Bibliografiska uppgifter
I publikationen:Materials (Basel)
Huvudupphovsmän: Kim, Kyung Su, Ahn, Cheol Hyoun, Kang, Won Jun, Cho, Sung Woon, Jung, Sung Hyeon, Yoon, Dae Ho, Cho, Hyung Koun
Materialtyp: Artigo
Språk:Inglês
Publicerad: MDPI 2017
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Article
Länkar:https://ncbi.nlm.nih.gov/pmc/articles/PMC5458990/
https://ncbi.nlm.nih.gov/pubmed/28772888
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/ma10050530
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