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An All Oxide-Based Imperceptible Thin-Film Transistor with Humidity Sensing Properties
We have examined the effects of oxygen content and thickness in sputtered InSnO (ITO) electrodes, especially for the application of imperceptible amorphous-InGaZnO (a-IGZO) thin-film transistors (TFTs) in humidity sensors. The imperceptible a-IGZO TFT with 50-nm ITO electrodes deposited at Ar:O(2) =...
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| Publicado no: | Materials (Basel) |
|---|---|
| Main Authors: | , , , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
MDPI
2017
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5458990/ https://ncbi.nlm.nih.gov/pubmed/28772888 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/ma10050530 |
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