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X-ray topography of subsurface crystal layers

New capabilities of the Berg–Barrett topographic method are demonstrated using a skew-asymmetric X-ray diffraction scheme for investigating structural changes near the surface of semiconductor materials. Specifying the X-ray extinction depth, the details of defects and strains are revealed with high...

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Bibliografiske detaljer
Udgivet i:J Appl Crystallogr
Main Authors: Swiatek, Zbigniew, Fodchuk, Igor, Zaplitnyy, Ruslan
Format: Artigo
Sprog:Inglês
Udgivet: International Union of Crystallography 2017
Fag:
Online adgang:https://ncbi.nlm.nih.gov/pmc/articles/PMC5458592/
https://ncbi.nlm.nih.gov/pubmed/28656038
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1107/S1600576717007208
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