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Unraveling the Morphological Evolution and Etching Kinetics of Porous Silicon Nanowires During Metal-Assisted Chemical Etching

Many potential applications of porous silicon nanowires (SiNWs) fabricated with metal-assisted chemical etching are highly dependent on the precise control of morphology for device optimization. However, the effects of key etching parameters, such as the amount of deposited metal catalyst, HF–oxidan...

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Bibliografiske detaljer
Udgivet i:Nanoscale Res Lett
Main Authors: Vinzons, Lester U., Shu, Lei, Yip, SenPo, Wong, Chun-Yuen, Chan, Leanne L. H., Ho, Johnny C.
Format: Artigo
Sprog:Inglês
Udgivet: Springer US 2017
Fag:
Online adgang:https://ncbi.nlm.nih.gov/pmc/articles/PMC5457386/
https://ncbi.nlm.nih.gov/pubmed/28582967
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/s11671-017-2156-z
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