High Performance and Low power Monolithic Three-Dimensional Sub-50 nm Poly Si Thin film transistor (TFTs) Circuits

Development of manufacture trend for TFTs technologies has focused on improving electrical properties of films with the cost reduction to achieve commercialization. To achieve this goal, high-performance sub-50 nm TFTs-based MOSFETs with ON-current (I(on))/subthreshold swing (S.S.) of 181 µA/µm/107 ...

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Detalhes bibliográficos
Publicado no:Sci Rep
Main Authors: Wu, Tsung-Ta, Huang, Wen-Hsien, Yang, Chih-Chao, Chen, Hung-Chun, Hsieh, Tung-Ying, Lin, Wei-Sheng, Kao, Ming-Hsuan, Chen, Chiu-Hao, Yao, Jie-Yi, Jian, Yi-Ling, Hsu, Chiung-Chih, Lin, Kun-Lin, Shen, Chang-Hong, Chueh, Yu-Lun, Shieh, Jia-Min
Formato: Artigo
Idioma:Inglês
Publicado em: Nature Publishing Group UK 2017
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Article
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC5431052/
https://ncbi.nlm.nih.gov/pubmed/28465531
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/s41598-017-01012-y
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