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Electronic Structure and Charge-Trapping Characteristics of the Al(2)O(3)-TiAlO-SiO(2) Gate Stack for Nonvolatile Memory Applications
In this work, high-k composite TiAlO film has been investigated as charge-trapping material for nonvolatile memory applications. The annealing formed Al(2)O(3)-TiAlO-SiO(2) dielectric stack demonstrates significant memory effects and excellent reliability properties. The memory device exhibits a lar...
Gorde:
| Argitaratua izan da: | Nanoscale Res Lett |
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| Egile Nagusiak: | , , , , , , , , , , , |
| Formatua: | Artigo |
| Hizkuntza: | Inglês |
| Argitaratua: |
Springer US
2017
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| Gaiak: | |
| Sarrera elektronikoa: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5391346/ https://ncbi.nlm.nih.gov/pubmed/28410556 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/s11671-017-2040-x |
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