Lanean...
A Novel Nanofabrication Technique of Silicon-Based Nanostructures
A novel nanofabrication technique which can produce highly controlled silicon-based nanostructures in wafer scale has been proposed using a simple amorphous silicon (α-Si) material as an etch mask. SiO(2) nanostructures directly fabricated can serve as nanotemplates to transfer into the underlying s...
Gorde:
| Argitaratua izan da: | Nanoscale Res Lett |
|---|---|
| Egile Nagusiak: | , , , , , |
| Formatua: | Artigo |
| Hizkuntza: | Inglês |
| Argitaratua: |
Springer US
2016
|
| Gaiak: | |
| Sarrera elektronikoa: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5110523/ https://ncbi.nlm.nih.gov/pubmed/27848239 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/s11671-016-1702-4 |
| Etiketak: |
Etiketa erantsi
Etiketarik gabe, Izan zaitez lehena erregistro honi etiketa jartzen!
|