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High-throughput characterization of film thickness in thin film materials libraries by digital holographic microscopy
A high-throughput characterization technique based on digital holography for mapping film thickness in thin-film materials libraries was developed. Digital holographic microscopy is used for fully automatic measurements of the thickness of patterned films with nanometer resolution. The method has se...
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| Pubblicato in: | Sci Technol Adv Mater |
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| Autori principali: | , , , , , , |
| Natura: | Artigo |
| Lingua: | Inglês |
| Pubblicazione: |
Taylor & Francis
2011
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| Soggetti: | |
| Accesso online: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5074422/ https://ncbi.nlm.nih.gov/pubmed/27877428 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1088/1468-6996/12/5/054201 |
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