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Electrostatic repulsive out-of-plane actuator using conductive substrate
A pseudo-three-layer electrostatic repulsive out-of-plane actuator is proposed. It combines the advantages of two-layer and three-layer repulsive actuators, i.e., fabrication requirements and fill factor. A theoretical model for the proposed actuator is developed and solved through the numerical cal...
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| I publikationen: | Sci Rep |
|---|---|
| Huvudupphovsmän: | , , , , , , |
| Materialtyp: | Artigo |
| Språk: | Inglês |
| Publicerad: |
Nature Publishing Group
2016
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| Ämnen: | |
| Länkar: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5054362/ https://ncbi.nlm.nih.gov/pubmed/27713542 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/srep35118 |
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