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Novel Diamond Films Synthesis Strategy: Methanol and Argon Atmosphere by Microwave Plasma CVD Method Without Hydrogen

Diamond thin films are grown on silicon substrates by only using methanol and argon mixtures in microwave plasma chemical vapor deposition (MPCVD) reactor. It is worth mentioning that the novel strategy makes the synthesis reaction works smoothly without hydrogen atmosphere, and the substrates tempe...

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Detalhes bibliográficos
Publicado no:Nanoscale Res Lett
Main Authors: Yang, Li, Jiang, Caiyi, Guo, Shenghui, Zhang, Libo, Gao, Jiyun, Peng, Jinhui, Hu, Tu, Wang, Liang
Formato: Artigo
Idioma:Inglês
Publicado em: Springer US 2016
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC5028358/
https://ncbi.nlm.nih.gov/pubmed/27644241
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/s11671-016-1628-x
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