Deposition of Boron-Doped Thin CVD Diamond Films from Methane-Triethyl Borate-Hydrogen Gas Mixture

Boron-doped diamond is a promising semiconductor material that can be used as a sensor and in power electronics. Currently, researchers have obtained thin boron-doped diamond layers due to low film growth rates (2–10 μm/h), with polycrystalline diamond growth on the front and edge planes of thicker...

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Main Authors: Nikolay Ivanovich Polushin, Alexander Ivanovich Laptev, Boris Vladimirovich Spitsyn, Alexander Evgenievich Alexenko, Alexander Mihailovich Polyansky, Anatoly Lvovich Maslov, Tatiana Vladimirovna Martynova
Formato: Artigo
Idioma:Inglês
Publicado em: MDPI AG 2020-06-01
Colecção:Processes
Assuntos:
CVD process
doping
single-crystal diamond
boron
triethyl borate
thin films
Acesso em linha:https://www.mdpi.com/2227-9717/8/6/666
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