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A mixed solution-processed gate dielectric for zinc-tin oxide thin-film transistor and its MIS capacitance

Solution-processed gate dielectrics were fabricated with the combined ZrO(2) and Al(2)O(3) (ZAO) in the form of mixed and stacked types for oxide thin film transistors (TFTs). ZAO thin films prepared with double coatings for solid gate dielectrics were characterized by analytical tools. For the firs...

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Bibliographic Details
Published in:Sci Rep
Main Authors: Kim, Hunho, Kwack, Young-Jin, Yun, Eui-Jung, Choi, Woon-Seop
Format: Artigo
Language:Inglês
Published: Nature Publishing Group 2016
Subjects:
Online Access:https://ncbi.nlm.nih.gov/pmc/articles/PMC5027534/
https://ncbi.nlm.nih.gov/pubmed/27641430
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/srep33576
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