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A mixed solution-processed gate dielectric for zinc-tin oxide thin-film transistor and its MIS capacitance

Solution-processed gate dielectrics were fabricated with the combined ZrO(2) and Al(2)O(3) (ZAO) in the form of mixed and stacked types for oxide thin film transistors (TFTs). ZAO thin films prepared with double coatings for solid gate dielectrics were characterized by analytical tools. For the firs...

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Библиографические подробности
Опубликовано в: :Sci Rep
Главные авторы: Kim, Hunho, Kwack, Young-Jin, Yun, Eui-Jung, Choi, Woon-Seop
Формат: Artigo
Язык:Inglês
Опубликовано: Nature Publishing Group 2016
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Online-ссылка:https://ncbi.nlm.nih.gov/pmc/articles/PMC5027534/
https://ncbi.nlm.nih.gov/pubmed/27641430
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/srep33576
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