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Non-destructive imaging of buried electronic interfaces using a decelerated scanning electron beam

Recent progress in nanotechnology enables the production of atomically abrupt interfaces in multilayered junctions, allowing for an increase in the number of transistors in a processor. However, uniform electron transport has not yet been achieved across the entire interfacial area in junctions due...

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Detalhes bibliográficos
Publicado no:Nat Commun
Main Authors: Hirohata, Atsufumi, Yamamoto, Yasuaki, Murphy, Benedict A., Vick, Andrew J.
Formato: Artigo
Idioma:Inglês
Publicado em: Nature Publishing Group 2016
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC5025776/
https://ncbi.nlm.nih.gov/pubmed/27586090
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/ncomms12701
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