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Chemical and structural analysis on magnetic tunnel junctions using a decelerated scanning electron beam
Current information technology relies on the advancement of nanofabrication techniques. For instance, the latest computer memories and hard disk drive read heads are designed with a 12 nm node and 20 nm wide architectures, respectively. With matured nanofabrication processes, a yield of such nanoele...
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| Publicado no: | Sci Rep |
|---|---|
| Main Authors: | , , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Nature Publishing Group UK
2018
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5954102/ https://ncbi.nlm.nih.gov/pubmed/29765061 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1038/s41598-018-25638-8 |
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