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A Micromachined Piezoresistive Pressure Sensor with a Shield Layer
This paper presents a piezoresistive pressure sensor with a shield layer for improved stability. Compared with the conventional piezoresistive pressure sensors, the new one reported in this paper has an n-type shield layer that covers p-type piezoresistors. This shield layer aims to minimize the imp...
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| Publicado en: | Sensors (Basel) |
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| Main Authors: | , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado: |
MDPI
2016
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| Assuntos: | |
| Acceso en liña: | https://ncbi.nlm.nih.gov/pmc/articles/PMC5017451/ https://ncbi.nlm.nih.gov/pubmed/27529254 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3390/s16081286 |
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