Carregant...

Surface Morphology Transformation Under High-Temperature Annealing of Ge Layers Deposited on Si(100)

We study the surface morphology and chemical composition of SiGe layers after their formation under high-temperature annealing at 800–1100 °C of 30–150 nm Ge layers deposited on Si(100) at 400–500 °C. It is found that the annealing leads to the appearance of the SiGe layers of two types, i.e., porou...

Descripció completa

Guardat en:
Dades bibliogràfiques
Publicat a:Nanoscale Res Lett
Autors principals: Shklyaev, A. A., Latyshev, A. V.
Format: Artigo
Idioma:Inglês
Publicat: Springer US 2016
Matèries:
Accés en línia:https://ncbi.nlm.nih.gov/pmc/articles/PMC4991982/
https://ncbi.nlm.nih.gov/pubmed/27541814
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/s11671-016-1588-1
Etiquetes: Afegir etiqueta
Sense etiquetes, Sigues el primer a etiquetar aquest registre!