A carregar...
Advancing X-ray scattering metrology using inverse genetic algorithms
We compare the speed and effectiveness of two genetic optimization algorithms to the results of statistical sampling via a Markov chain Monte Carlo algorithm to find which is the most robust method for determining real space structure in periodic gratings measured using critical dimension small angl...
Na minha lista:
| Publicado no: | J Micro Nanolithogr MEMS MOEMS |
|---|---|
| Main Authors: | , , , |
| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
2016
|
| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4990789/ https://ncbi.nlm.nih.gov/pubmed/27551326 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1117/1.JMM.15.3.034001 |
| Tags: |
Adicionar Tag
Sem tags, seja o primeiro a adicionar uma tag!
|