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Enhancement of ARROW Photonic Device Performance via Thermal Annealing of PECVD-based SiO(2) Waveguides
Silicon-based optofluidic devices are very attractive for applications in biophotonics and chemical sensing. Understanding and controlling the properties of their dielectric waveguides is critical for the performance of these chips. We report that thermal annealing of PECVD-grown silicon dioxide (Si...
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| Publicat a: | IEEE J Sel Top Quantum Electron |
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| Autors principals: | , , , , |
| Format: | Artigo |
| Idioma: | Inglês |
| Publicat: |
2016
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| Matèries: | |
| Accés en línia: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4987089/ https://ncbi.nlm.nih.gov/pubmed/27547024 |
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