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Interfacial coherency stress distribution in TiN/AlN bilayer and multilayer films studied by FEM analysis
The development of interfacial coherency stresses in TiN/AlN bilayer and multilayer films was investigated by finite element method (ABAQUS) using the four-node bilinear quadrilateral axisymmetric element CAX4R. The TiN and AlN layers are always in compression and tension at the interface, respectiv...
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| Pubblicato in: | Comput Mater Sci |
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| Autori principali: | , , |
| Natura: | Artigo |
| Lingua: | Inglês |
| Pubblicazione: |
Elsevier Science Pub. Co
2012
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| Soggetti: | |
| Accesso online: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4986319/ https://ncbi.nlm.nih.gov/pubmed/27570370 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1016/j.commatsci.2011.11.024 |
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