Fracture properties of thin film TiN at elevated temperatures

We provide an experimental and theoretical description of the high temperature fracture behaviour of TiN thin films. For this, we employ molecular dynamics and density functional theory, to show that the surface energies drop insignificantly between 0 and 1000 K. We utilise these results to predict...

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Autors principals: J. Buchinger, L. Löfler, J. Ast, A. Wagner, Z. Chen, J. Michler, Z.L. Zhang, P.H. Mayrhofer, D. Holec, M. Bartosik
Format: Artigo
Idioma:Inglês
Publicat: Elsevier 2020-09-01
Col·lecció:Materials & Design
Matèries:
High temperature micromechanics
Transition metal nitrides
Thin films
Sputtering
Molecular dynamics
Continuum mechanics
Accés en línia:http://www.sciencedirect.com/science/article/pii/S0264127520304196
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