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NO gas sensing at room temperature using single titanium oxide nanodot sensors created by atomic force microscopy nanolithography

In this work, the fabrication of single titanium oxide nanodot (ND) resistive sensors for NO gas sensing at room temperature is reported. Two atomic force microscopy nanolithography methods, nanomachining and nano-oxidation, are employed. A single titanium nanowire (NW) is created first along with c...

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Detalhes bibliográficos
Publicado no:Beilstein J Nanotechnol
Main Authors: Hong, Li-Yang, Lin, Heh-Nan
Formato: Artigo
Idioma:Inglês
Publicado em: Beilstein-Institut 2016
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC4979878/
https://ncbi.nlm.nih.gov/pubmed/27547622
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.3762/bjnano.7.97
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