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Effect of Oxidation Condition on Growth of N: ZnO Prepared by Oxidizing Sputtering Zn-N Film

Nitrogen-doped zinc oxide (N: ZnO) films have been prepared by oxidizing reactive RF magnetron-sputtering zinc nitride (Zn-N) films. The effect of oxidation temperature and oxidation time on the growth, transmittance, and electrical properties of the film has been explored. The results show that bot...

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Detalhes bibliográficos
Publicado no:Nanoscale Res Lett
Main Authors: Qin, Xuesi, Li, Guojian, Xiao, Lin, Chen, Guozhen, Wang, Kai, Wang, Qiang
Formato: Artigo
Idioma:Inglês
Publicado em: Springer US 2016
Assuntos:
Acesso em linha:https://ncbi.nlm.nih.gov/pmc/articles/PMC4889532/
https://ncbi.nlm.nih.gov/pubmed/27251324
https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/s11671-016-1485-7
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