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Deposition of F-doped ZnO transparent thin films using ZnF(2)-doped ZnO target under different sputtering substrate temperatures
Highly transparent and conducting fluorine-doped ZnO (FZO) thin films were deposited onto glass substrates by radio-frequency (RF) magnetron sputtering, using 1.5 wt% zinc fluoride (ZnF(2))-doped ZnO as sputtering target. Structural, electrical, and optical properties of the FZO thin films were inve...
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| Main Authors: | , , |
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| Formato: | Artigo |
| Idioma: | Inglês |
| Publicado em: |
Springer
2014
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| Assuntos: | |
| Acesso em linha: | https://ncbi.nlm.nih.gov/pmc/articles/PMC3984747/ https://ncbi.nlm.nih.gov/pubmed/24572004 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.1186/1556-276X-9-97 |
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