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Barriers to Quantitative Electron Probe X-Ray Microanalysis for Low Voltage Scanning Electron Microscopy
Low voltage x-ray microanalysis, defined as being performed with an incident beam energy ≤5 keV, can achieve spatial resolution, laterally and in depth, of 100 nm or less, depending on the exact selection of beam energy and the composition of the target. The shallow depth of beam penetration, with t...
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| 出版年: | J Res Natl Inst Stand Technol |
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| 第一著者: | |
| フォーマット: | Artigo |
| 言語: | Inglês |
| 出版事項: |
[Gaithersburg, MD] : U.S. Dept. of Commerce, National Institute of Standards and Technology
2002
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| 主題: | |
| オンライン･アクセス: | https://ncbi.nlm.nih.gov/pmc/articles/PMC4863847/ https://ncbi.nlm.nih.gov/pubmed/27446755 https://ncbi.nlm.nih.govhttp://dx.doi.org/10.6028/jres.107.049 |
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